@conference{21066,
  author = {Bryan Barnes and Jing Qin and Hui Zhou and Richard Silver},
  title = {Quantitative microscope characterization for parametric measurements with sub-nm parametric uncertainties},
  year = {2013},
  number = {8819},
  month = {2013-09-23},
  publisher = {Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, San Diego, CA},
  doi = {https://doi.org/10.1117/12.2027259},
  language = {en},
}