@conference{208971,
  author = {Ravikiran Attota and Victor Vertanian and Steve Olson and Robert Edgeworth and Iqbal Ali and Craig Huffman and Pate Moschak and Harry Lazier and Elizabeth Lorenzini},
  title = {TSV REVEAL HEIGHT AND BUMP DIMENSION METROLOGY BY THE TSOM METHOD: FROM NANOMETER TO MICROMETER SCALE},
  year = {2013},
  month = {2013-01-23},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics
, Gaithersburg, MD},
  language = {en},
}