@conference{208436,
  author = {Ravikiran Attota and John Kramar},
  title = {Optimizing noise for defect analysis with through-focus scanning optical microscopy},
  year = {2016},
  month = {2016-03-25},
  publisher = {SPIE Advanced Lithography, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920308},
  language = {en},
}