@conference{207906, author = {Felipe Guzman and Oliver Gerberding and John Melcher and Julian Stirling and Jon Pratt and Gordon Shaw and Jacob Taylor}, title = {Optomechanical Motion Sensors}, year = {2015}, month = {2015-07-08}, publisher = {Proceedings ASPE 2015 Summer Topical Meeting, Precision Interferometric Metrology, Golden, CO}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918898}, language = {en}, }