@conference{20781,
  author = {Jing Qin and Hui Zhou and Bryan Barnes and Ronald Dixson and Richard Silver},
  title = {3-D Optical Metrology of Finite sub-20nm Dense Arrays With sub-nanometer Parametric Uncertainties},
  year = {2013},
  month = {2013-06-23},
  publisher = {OSA Technical Digests, Alexandria, VA},
  doi = {https://doi.org/10.1364/AOPT.2013.JTu4A.32},
  language = {en},
}