@misc{191056,
  author = {Andras Vladar and Michael Postek and John Villarrubia},
  title = {Exploring and Extending the Limits of CD-SEMs' Resolution},
  year = {2003},
  month = {2003-03-01},
  publisher = {Exploring and Extending the Limits of CD-SEMs' Resolution},
  language = {en},
}