@conference{190811,
  author = {Michael Postek},
  title = {Potentials for Inspection and Metrology of MEMS Using a Combined Scanning Electron Microscope (SEM) and Proximal Probe Microscope (PPM)},
  year = {1997},
  number = {3225},
  month = {1997-09-01},
  publisher = {Proceedings of SPIE, Microlithography and Metrology in Micromachining III, Craig R. Friedrich, Akira Umeda, Editors, Austin, TX},
  language = {en},
}