@conference{190466,
  author = {James Potzick},
  title = {Neolithography Consortium: A Progress Report},
  year = {2001},
  number = {4186},
  month = {2001-01-01},
  publisher = {Proceedings of SPIE, 20th Annual BACUS Symposium on Photomask Technology, Brian J. Grenon, Giang T. Dao, Editors, Monterey, CA},
  language = {en},
}