@conference{189456,
  author = {Andras Vladar and John Villarrubia and Michael Postek},
  title = {A New Way of Handling Dimensional Meaurement Results for Integrated Circuit Technology},
  year = {2003},
  number = {5038},
  month = {2003-06-01},
  publisher = {Metrology, Inspection and Process Control for Microlithography | 17th | Metrology, Inspection and Process Control for Microlithography XVII | SPIE},
  language = {en},
}