@conference{189446,
  author = {Richard Silver and Ravikiran Attota and Michael Stocker and Jay Jun and Egon Marx and Robert Larrabee and B Russo and M Davidson},
  title = {Comparison of Measured Optical Image Profiles of Silicon Lines with Two Different Theoretical Models},
  year = {2002},
  number = {4689},
  month = {2002-07-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA},
  language = {en},
}