@conference{189301,
  author = {Andras Vladar and Crossley Jayewardene and Bradley Damazo and William Keery and Michael Postek},
  title = {Laser Sample Stage-Based Image Resolution Enhancement Method for SEMs},
  year = {2004},
  number = {5375},
  month = {2004-05-24},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  language = {en},
}