@misc{189296,
  author = {John Villarrubia and Ronald Dixson and Samuel Jones and J Lowney and Michael Postek},
  title = {Final Report: 1998-1999 NIST/SEMATECH Project on Intercomparison of Linewidth Measurement Methods},
  year = {2000},
  month = {2000-01-01},
  publisher = {Transfer Document; NIST/SEMATECH Proprietary},
  language = {en},
}