@article{189111,
  author = {James Potzick and J Pedulla and Michael Stocker},
  title = {Updated NIST Photomask Linewidth Standard},
  year = {2003},
  number = {5038-34},
  month = {2003-01-01},
  publisher = {Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology},
  language = {en},
}