@article{189006,
  author = {Ronald Dixson and Angela Guerry and Marylyn Bennett and Theodore Vorburger and Michael Postek},
  title = {Toward Traceability for At Line AFM Dimensional Metrology},
  year = {2002},
  number = {4689},
  month = {2002-01-01},
  publisher = {Proceedings of SPIE},
  language = {en},
}