@article{188611,
  author = {Michael Postek and Andras Vladar and O Wells and J Lowney},
  title = {Application of the Low-Loss Scanning Electron Microscope Image to Integrated Circuit Technology Part 1-Applications to Accurate Dimension Measurements},
  year = {2001},
  number = {23(5)},
  month = {2001-09-01},
  publisher = {Scanning},
  language = {en},
}