@conference{188341,
  author = {Michael Postek and Andras Vladar and Nien Zhang and Robert Larrabee},
  title = {Potentials of Online Scanning Electron Microscope Performance Analysis Using NIST Reference Material 8091},
  year = {2000},
  month = {2000-03-01},
  publisher = {Metrology, Inspection, and Process Control for Microlithography, Conference | 14th | | SPIE},
  language = {en},
}