@article{184206,
  author = {Ren Chang and Patrick Abbott},
  title = {Reproducibility of the Accommodation Coefficient of the Spinning Rotor Gauge},
  year = {2007},
  month = {2007-10-01},
  publisher = {Journal of Vacuum Science and Technology A},
  doi = {https://doi.org/10.1116/1.2790910},
  language = {en},
}