@article{167756,
  author = {Martin Green and Andrew Allen and Xiang Li and Junling Wang and J Ilavsky and A Delabie and R Puurunen and B Brijs},
  title = {The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation},
  year = {2006},
  number = {88},
  month = {2006-01-16},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854304},
  language = {en},
}