@article{134371, author = {Nhan Nguyen and Hao Xiong and John Suehle and Oleg Kirillov and Eric Vogel and Prashant Majhi and Huang-Chun Wen}, title = {Internal Photoemission Spectroscopy of [TaN/TaSiN] and [TaN/TaCN] Metal Stacks On SiO2 and [HfO2 / SiO2] Dielectric Stack.}, year = {2008}, number = {92}, month = {2008-03-06}, publisher = {Applied Physics Letters}, language = {en}, }