@conference{130206, author = {Douglas Smith and Gordon Shaw and R Seugling and D Xiang and Jon Pratt}, title = {Traceable Micro-Force Sensor for Instrumented Indentation Calibration}, year = {2007}, month = {2007-04-10}, publisher = {2007 Materials Research Society Spring Meeting, San Francisco, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824624}, language = {en}, }