@conference{129801,
  author = {Sebastien Bergna and Jason Gorman and Nicholas Dagalakis},
  title = {Design and Modeling of Thermally Actuated MEMS Nanopositioners},
  year = {2005},
  number = {IMECE2005-82158},
  month = {2005-11-11},
  publisher = {Proceedings of ASME International Mechanical Engineering Congress and Exposition, Orlando, FL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822370},
  language = {en},
}