@conference{129791,
  author = {Shaw Feng and Che Joung and Theodore Vorburger},
  title = {A Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy},
  year = {2008},
  month = {2008-03-17},
  publisher = {Scanning 2008, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824625},
  language = {en},
}