@article{1231136,
  author = {Pradeep Namboodiri and Jonathan Wyrick and Gheorghe Stan and Xiqiao Wang and Fan Fei and Ranjit Kashid and Scott Schmucker and Richard Kasica and Bryan Barnes and Michael Stewart and Richard M. Silver},
  title = {Multi-scale alignment to buried atom-scale devices using Kelvin probe force microscopy},
  year = {2024},
  number = {13},
  month = {2024-02-24 05:02:00},
  publisher = {Nanotechnology Reviews},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933456},
  doi = {https://doi.org/10.1515/ntrev-2023-0196},
  language = {en},
}