@article{1211101,
  author = {Robert F. Berg and Charles S. Tarrio and Thomas B. Lucatorto},
  title = {Measurements and model of UV-induced oxidation of aluminum},
  year = {2023},
  number = {41},
  month = {2023-03-22 04:03:00},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935448},
  doi = {https://doi.org/10.1116/6.0002432},
  language = {en},
}