@conference{1207746,
  author = {Olga Ridzel and Wataru Yamane and Ishiaka Mansaray and John S. Villarrubia},
  title = {Model Validation for Scanning Electron Microscopy},
  year = {2023},
  month = {2023-04-27 04:04:00},
  publisher = {Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936398},
  doi = {https://doi.org/10.1117/12.2661103},
  language = {en},
}