@misc{115531,
  author = {C Allocca},
  title = {Nanometrology - FY 2004 Programs and Selected Accomplishments},
  year = {2005},
  month = {2005-04-15},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}