@article{107896,
  author = {William Wallace and Kathleen Flynn and Joseph Antonucci},
  title = {Mass Spectrometry of Spin-On-Glass Low-K Dielectric Precursors},
  year = {2001},
  month = {2001-04-01},
  publisher = {Polymer Preprints},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851802},
  language = {en},
}