@conference{105606,
  author = {Ryna Marinenko and J Armstrong and Shirley Turner and Eric Steel and F Stevie},
  title = {Characterization of SiGe Bulk Compositional Standards with Electron Probe Microanalysis},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX},
  language = {en},
}