@article{103716,
  author = {Ndubuisi Orji and Ronald Dixson and Joseph Fu and Theodore Vorburger},
  title = {Traceable Pico-Meter Level Step Height Metrology},
  year = {2004},
  number = {257},
  month = {2004-12-01},
  publisher = {Wear},
  language = {en},
}