@conference{1026,
  author = {Mark and Richard Silver and Nien Zhang and Hui Zhou and Bryan Barnes},
  title = {The effect of systematic errors on the hybridization of optical critical dimension measurements},
  year = {2015},
  number = {9526},
  month = {2015-06-21},
  publisher = {SPIE Modeling Aspects in Optical Metrology V, Munich, -1},
  doi = {https://doi.org/10.1117/12.2189928},
  language = {en},
}