Thin Film X-ray Reflectometry Project
Combinatorial Measurement Methods for Advanced CMOS Devices
Electrochemistry of Metal-Semiconductor Interfaces
Fatigue in Silicon
Dimensional Metrology of Nanoscale Patterns
Piezospectroscopy Measurements and Standards
Polymers for Next-Generation Lithography
Thin Film Reliability
Thin Film X-ray Reflectometry
Nanoscale Strain Metrology Project
Materials Science & Engineering Laboratory (MSEL) Dr. Richard Cavanagh, Acting Director
(301) 975-5658 Telephone (301) 975-5012 Facsimile
NIST, 100 Bureau Drive M/S 8500 Gaithersburg, MD 20899-8500 msel@nist.gov